METHOD FOR PRODUCING PATTERNED DEPOSITION ON SUBSTRATE USING FLUID TO BE COMPRESSED

摘要

PROBLEM TO BE SOLVED: To make it possible to produce a patterned deposition with a thermally unstable/physically changeable material. SOLUTION: This method is for producing the patterned deposition on a substrate 14 using fluid to be compressed. A delivery system 12 cooperates with a controlled environment 30, 100, 200 holding the substrates 14 therein to receive a functional material 44 precipitated from the delivery system 12 through a fluid delivery route 13. A mask 22 is so disposed near the substrate 14 as to produce the patterned deposition on the substrate 14. COPYRIGHT: (C)2004,JPO&NCIPI