| 摘要 |
PROBLEM TO BE SOLVED: To provide a flow sensor and a flow measuring instrument capable of measuring a micro flow rate accurately, without depending on the kind of a measuring object, and without imparting a physical or chemical influence onto a fluid, as to a flow sensor for the various kinds of fluids. SOLUTION: This sensor for measuring the fluid flow rate is provided with a flow passage having a curved face, a movable film provided to divide the flow passage into two, and a detecting end paired with the movable film to detect a displacement of the movable film caused by pressure generated when the fluid passes through the curved face. In particular, the flow passage, the movable film and the detecting end are preferably integrally constituted, and a computing means is preferably provided to convert the displacement of the movable film detected by the detecting end into a flow rate change. The sensor is preferably provided also with a temperature measuring instrument or a pressure measuring instrument in the flow passage or in the vicinity of the flow passage. COPYRIGHT: (C)2004,JPO&NCIPI
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