| 摘要 |
PROBLEM TO BE SOLVED: To restrain vibration in the whole of a contact type probe caused by vibration of the probe, in the probe wherein a probe tip of the contact type probe is oscillated with a high-frequency wave to reduce frictional force between the probe tip and a measured face. SOLUTION: In this contact type probe for a contact type surface shape measuring instrument for measuring a surface shape of a measured object by bringing the tip of the probe into contact with the surface shape of the measured object, two or more of extension mechanisms are provided in the probe, and extendable directions thereof are reversed each other. The two or more of extension mechanisms arranged in the probe 2 are oscillated with the same frequency and the extension directions are reversed to offset vibrations applied from the both extension mechanisms onto the probe 2 therebetween. The whole probe 2 is thereby precluded from being vibrated by the vibration from the lower side extension mechanism for micro-vibration of the tip part of the probe 2, so as to restrain the vibration in (the whole of) the contact type probe associated with the vibration of the extension mechanisms. COPYRIGHT: (C)2004,JPO&NCIPI
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