发明名称 |
METHODS AND STRUCTURE FOR IMPROVING WAFER BOW CONTROL |
摘要 |
A method for controlling bow in wafers which utilize doped layers is described. The method includes depositing a silicon-germanium layer onto a substrate, depositing an undoped buffer layer onto the silicon-germanium layer, and depositing a silicon-boron layer onto the undoped layer.
|
申请公布号 |
US2004132227(A1) |
申请公布日期 |
2004.07.08 |
申请号 |
US20030337011 |
申请日期 |
2003.01.06 |
申请人 |
HORNING ROBERT D.;ROBINSON MCDONALD;SCULLARD TIMOTHY LOUIS |
发明人 |
HORNING ROBERT D.;ROBINSON MCDONALD;SCULLARD TIMOTHY LOUIS |
分类号 |
B81B3/00;B81C1/00;(IPC1-7):H01L21/00 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|