| 摘要 |
PROBLEM TO BE SOLVED: To improve the production efficiency for the connection of semiconductor elements. SOLUTION: A purge nozzle 8 for spraying inert gas to a junction part between an optical element and a submount is connected to a heating/cooling means 14 via an electromagnetic valve by means of inert gas supply pipes 6, 7, and an inert gas supply tube 10 is disposed in a ceramic heater 11 which heats a submount 12. In junction of the optical element, heated inert gas is sprayed to the junction part, and in cooling, cooled inert gas is sprayed to the junction part, and the ceramic heater is cooled. COPYRIGHT: (C)2004,JPO&NCIPI |
