发明名称 Semiconductor device
摘要 A semiconductor device has a substrate 1, a metal wiring 3 formed on the substrate 1 and covered with the films of a high-melting-point metal 2 and 4 immediately above and below and an interlayer insulating film 5 formed by a plasma CVD method so as to cover the metal wiring 3.
申请公布号 US2004130033(A1) 申请公布日期 2004.07.08
申请号 US20030678165 申请日期 2003.10.06
申请人 RENESAS TECHNOLOGY CORP. 发明人 MASAMITSU TAKESHI;MATSUOKA TAKERU;KAMOSHIMA TAKAO
分类号 H01L23/52;H01L21/31;H01L21/316;H01L21/3205;H01L21/768;H01L23/532;(IPC1-7):H01L23/48 主分类号 H01L23/52
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