| 摘要 |
PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostriction device wherein vibration-proof property against an air stream is excellent, and off-tracking can be suppressed while meeting the requirements for high speed accessing and high data density. SOLUTION: The piezoelectric/electrostriction device 40 includes a substrate 3 having two arm sections 2 comprising a thin plate-shaped member provided at opposite ends of a support section 1 comprising a thick member, at least a pair of electrodes 4 fixedly mounted on at least the one arm 2 of the substrate 3, and a drive structure including one piezoelectric/electrostriction layer 5. In the piezoelectric/electrostriction device 40, a plurality of trenches 9 are provided at least in a surface of the support section 1 positioned on the extending direction side of the arm 2. COPYRIGHT: (C)2004,JPO&NCIPI
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