| 摘要 |
PROBLEM TO BE SOLVED: To provide a static air bearing spindle with high rotational run-out accuracy by minimizing loads on the load side tip part of a spindle and on a motor rotor part by exhausted air. SOLUTION: This static air bearing spindle comprises static air journal bearings 3 and 4 and static air thrust bearings 5 and 6 supporting the spindle 2, a first exhaust passage 13 and a second exhaust passage 14 leading exhaust gas from the static air bearings to the outside of the spindle 2. A third exhaust passage 14 leading the exhaust gas from the second exhaust passage 14 to the outside is formed on the load side of the static air thrust bearing 6. A load side clearance 19 formed between the load side static air thrust bearing 6 and a thrust plate 2a is minimized, the load side tip part 10a of a sleeve 10 is formed in a projected labyrinth shape, and an anti-load side clearance 20 formed between the load side end part of the sleeve 10 and the anti-load side of the static air journal bearing 3 is minimized. A fourth exhaust passage 17 leading the exhaust gas from the first exhaust passage 13 is formed in a housing 1. COPYRIGHT: (C)2004,JPO&NCIPI
|
