| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate for a surface acoustic wave sensor having a surface orientation suitable for a surface acoustic wave sensor. SOLUTION: A substrate which is formed from a langasite (La<SB>3</SB>Ga<SB>5</SB>SiO<SB>14</SB>) single crystal and has a surface orientation defined by Euler angles of -5°<ϕ<5°, 5°<θ<110°and 10°<ψ<45°is used as the piezoelectric substrate for the surface acoustic wave sensor with a working temperature range of≤150°C. In a working temperature range of≥250°C, a substrate with a surface orientation defined by Euler angles of -5°<ϕ<5°, 5°<θ<100°and 20°<ψ<45°is used. Preferably,ϕ,θandψare 0°, 30°and 30°, respectively. COPYRIGHT: (C)2004,JPO&NCIPI
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