发明名称 Polymer film metalization
摘要 Embodiments in accordance with the present invention eliminate the need for a subtractive metal patterning process to pattern the electrode above a ferroelectric polymer. Instead, a selective electroless deposition process is used. A conductive polymer is used as a seed layer for the electroless plating of the metal electrode. A cost saving is provided by eliminating the chemical costs associated with conventional resist removal processing. The methods also potentially eliminate the requirement for aggressive and environmentally unsafe chemical-based photoresist removal processes.
申请公布号 US2004132285(A1) 申请公布日期 2004.07.08
申请号 US20030337960 申请日期 2003.01.06
申请人 ANDIDEH EBRAHIM;DIANA DANIEL C. 发明人 ANDIDEH EBRAHIM;DIANA DANIEL C.
分类号 C25D5/02;C25D7/12;H01L21/00;H01L21/28;H01L21/288;H01L21/44;H01L21/768;H01L21/8242;(IPC1-7):H01L21/44 主分类号 C25D5/02
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