发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor device comprises a diffusion layer in a semiconductor substrate, a gate insulation film on the semiconductor substrate, a gate electrode on the gate insulation film, an interlayer insulation film on the semiconductor substrate so as to cover the gate electrode, and a capacitor on the interlayer insulation film. The capacitor includes a laminated structure made up of a lower electrode, a dielectric film, and an upper electrode. The diffusion layers, the gate electrode, and the lower electrode are connected to one another by a common contact in the interlayer insulation film.
申请公布号 US2004129963(A1) 申请公布日期 2004.07.08
申请号 US20030455371 申请日期 2003.06.06
申请人 RENESAS TECHNOLOGY CORP. 发明人 AMO ATSUSHI;HACHISUKA ATSUSHI;KASAOKA TATSUO
分类号 G11C15/04;G11C11/405;H01L21/768;H01L21/8242;H01L27/02;H01L27/108;(IPC1-7):H01L27/108 主分类号 G11C15/04
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