| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope technique for highly accurately measuring a distance between a desired position in an image and a reference position, assuming that at least one point outside the visual field of the measurement image is the reference position. SOLUTION: This scanning probe microscope is equipped with an X-displacement detection part 141 and a Y-displacement detection part for detecting the relative position of a probe 1 to a specimen 3, an image acquisition part 9 having the function of storing the detection result obtained by the X-displacement detection part 141 and the Y-displacement detection part, and a means for obtaining the coordinates on a second image positioned outside the visual field of a first image from the detection result obtained by the X-displacement detection part 141 and the Y-displacement detection part, assuming that one point on the first image is the reference position. COPYRIGHT: (C)2004,JPO&NCIPI
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