| 摘要 |
PROBLEM TO BE SOLVED: To provide gas laser oscillation equipment of variable beam mode which is excellent in controllability and economy. SOLUTION: A plurality of discharge sections 2a and 2b are formed in an optical resonance space, with electrodes 12a and 12b different in shape, size, and structure provided. A laser medium gas circulates a circulation path that comprises a blower 6, and heat exchangers 5a and 5b. If the discharge sections 2a and 2b independently discharge, different modes from each other are provided. If both discharge sections 2a and 2b discharge, intermediate modes are provided according to power distribution supplied from discharge excitation power supplies 1a and 1b which independently operate. If there are three or more discharge sections, the supply distribution of discharge power to the discharge sections can be controlled for at least two discharge sections among them, and the shape and size of the discharge section or the shape size, and structure of the electrode are so selected that "a different mode is excited in independent discharge". COPYRIGHT: (C)2004,JPO&NCIPI |
