NON-CONTACT BEARING SPINDLE DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a non-contact bearing spindle device capable of coping with the ultra precision working, while preventing a thermal influence to the outside by the exhaust from a static pressure gas bearing. SOLUTION: This non-contact bearing spindle device 1 is formed by supporting a spindle 2 with the static pressure gas bearings 4 and 5 or combination of the static pressure gas bearing and a magnetic bearing inside a spindle housing 3. An exhaust tube 20 for discharging the gas discharged from the static pressure gas bearings 4 and 5 to a place separated from the spindle housing 3 is provided to be extended outside of the spindle housing 3. A gas blow opening 21 for generating an exhaust flow is opened in a clearance between the outside diameter surface of the spindle and the spindle housing 3 on a side close to the tool fitting end than the static pressure gas bearing 4. COPYRIGHT: (C)2004,JPO&NCIPI