发明名称 Semiconductor wafer and a methd for manufacturing a semiconductor wafer
摘要 A semiconductor wafer includes (a) a first principal side and a second principal side opposite to each other, (b) a first bevel contour and a second bevel contour provided at an outer periphery of the first principal side and the second principal side, (c) a first recess formed in the first bevel contour, and (d) a first type of ID mark configured by a protruding dot provided on a bottom face of the first recess.
申请公布号 US2004129940(A1) 申请公布日期 2004.07.08
申请号 US20030687705 申请日期 2003.10.20
申请人 发明人 IWASE MASAO;NADAHARA SOICHI
分类号 H01L21/02;H01L23/544;H01L29/06;(IPC1-7):H01L23/58 主分类号 H01L21/02
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