发明名称 |
High purity fluoropolymers |
摘要 |
The invention relates to high purity fluoropolymers and processes for making such materials. These polymers are particularly suited for applications in the semiconductor industry. The process comprises removal of unstable polymer end groups by fluorination and removal of heavy metal impurities by extraction with an aqueous acid medium.
|
申请公布号 |
US2004132927(A1) |
申请公布日期 |
2004.07.08 |
申请号 |
US20030743208 |
申请日期 |
2003.12.22 |
申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
BLONG THOMAS J.;DUCHESNE DENIS;LOEHR GERNOT;KILLICH ALBERT;ZIPPLIES TILMAN;KAULBACH RALPH;STRASSER HERBERT |
分类号 |
C08F6/06;C08F6/22;(IPC1-7):C08L61/06 |
主分类号 |
C08F6/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|