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发明名称
ZUSAMMENSETZUNG UND VERFAHREN ZUM CHEMISCH-MECHANISCHEN POLIEREN VON ISOLATOREN UND METALLEN
摘要
申请公布号
DE60006135(T2)
申请公布日期
2004.07.08
申请号
DE20006006135T
申请日期
2000.08.23
申请人
RODEL HOLDINGS, INC.
发明人
COSTAS, D.;SHEN, JAMES;MANDIGO, C.;THOMAS, M.;LACK, D.;BARKER, E.
分类号
B24B57/02;B24B37/00;C09G1/02;C09K3/14;H01L21/02;H01L21/304;H01L21/306;H01L21/3105;H01L21/321;(IPC1-7):C09K3/14;H01L21/302
主分类号
B24B57/02
代理机构
代理人
主权项
地址
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