| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam working apparatus and a laser beam working method which can uniformly work at high speed, even in the case that holes to be worked are arranged with irregular pattern. <P>SOLUTION: The laser beam 3 is divided into two directions with a laser path dividing means 7 and also, the laser beams 3 divided into the two directions are adjusted so that the axis in these centers is same with a beam path adjustment means 12. Further, in a single-hole beam path 8, one hole mask 10 is disposed and in a poly-hole beam path 9, a poly-hole mask 11 for poly-holes, is disposed between the beam path dividing means 7 and the beam path adjustment means 12, respectively, and also, a deflection means 13 is arranged between the beam path adjustment means 12 and a work 15. Then, either one in two beam paths of the laser beam 3 is positioned according to the working pattern. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
