| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum treatment apparatus which reduces spherical projections produced on the side of the bottom plate of a base body to be treated, and uniformizes the film thickness and the film quality of a deposited film more. SOLUTION: The vacuum treatment apparatus is provided with a reaction vessel 12 permitting evacuation for subjecting the cylindrical base body 11 to vacuum treatment, a base body holding member 13 for holding the cylindrical base body 11, a gas feed tube 14 for introducing a gaseous starting material into the reaction vessel 12, and a high frequency electrode 15 capable of feeding high frequency electric power exciting the gaseous starting material introduced into the reaction vessel 12 and generating glow discharge. Further, the reaction vessel 12 has a bottom plate 23 provided with an exhaust port 26 for exhausting the inside of the reaction vessel 12 into a vacuum. Then, the distance A between the inside face of the bottom board 23 and the lower end of the cylindrical base body 11 held by the base body holding member 12 satisfies the condition of 70mm≤A≤300mm. COPYRIGHT: (C)2004,JPO&NCIPI
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