发明名称 |
Capillary tube vibration optical measurement arrangement, for use with a wire bonder used in connecting semiconductor chips, has two aperture plates in a measurement body for defining the diameter of a measurement beam |
摘要 |
<p>Arrangement for measuring the vibration amplitude of the tip of a capillary tube (1) comprises a light source that emits a light beam (6) towards a light receiver (11) and two aperture plates (8, 10) arranged between source and receiver on the same axis (19). The aperture plates are formed from drilled holes (17, 18) in the side walls (15, 16) of a channel (14) formed in a body (13). The two aperture plates define the diameter of the light beam.</p> |
申请公布号 |
DE10357418(A1) |
申请公布日期 |
2004.07.08 |
申请号 |
DE2003157418 |
申请日期 |
2003.12.02 |
申请人 |
ESEC TRADING S.A., CHAM |
发明人 |
MELZER, MARTIN |
分类号 |
G01H9/00;(IPC1-7):G01H9/00;H01L21/607 |
主分类号 |
G01H9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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