发明名称 |
III-GROUP NITRIDE CRYSTAL, METHOD FOR CRYSTAL GROWTH THEREOF, AND SEMICONDUCTOR DEVICE AND SYSTEM |
摘要 |
<P>PROBLEM TO BE SOLVED: To stably grow a crystal of a III-group nitride, wherein a crystalline aggregate constituted of many crystals is formed and covering of a surface of a mixed fused solution is diminished. <P>SOLUTION: In a reactor 11, the mixed fused solution composed of an alkali metal and a III-group metal is formed. When the crystal of a III-group nitride composed of the III-group metal and nitrogen is grown from the said mixed fused solution 25 and a material containing at least nitrogen, a pressure of the material containing nitrogen is raised in accordance with raising a temperature of the mixed fused solution 25. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
申请公布号 |
JP2004189590(A) |
申请公布日期 |
2004.07.08 |
申请号 |
JP20030392203 |
申请日期 |
2003.11.21 |
申请人 |
RICOH CO LTD |
发明人 |
IWATA HIROKAZU;SARAYAMA SHOJI |
分类号 |
C30B29/38;C30B9/06;H01L21/338;H01L27/14;H01L29/778;H01L29/812;H01L31/108;H01L33/06;H01L33/32;H01L33/40;H01L33/62;H01S5/323;H01S5/343 |
主分类号 |
C30B29/38 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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