| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which can easily set and change control parameters and a temperature control method therefor. SOLUTION: The PID control unit 21 comprises a master controller 216 for outputting a manipulation amount Mv by conducting the PID calculation for making zero a deviation of a compensation target temperature Sv' and a measuring temperature MTC_TOP; a slave controller 218 for conducting the PID calculation for making zero a deviation of the manipulation amount Mv and measuring temperature PTC_TOP; an Sv compensating unit 211 for outputting the compensation target temperature Sv' by the predetermined compensating calculation during the lumping; a reset generating unit 212 for inputting, to an integrator of the master controller 216, the signal including the parameter value for predetermined integral calculation when starting the lumping; and a fuzzy controller 214 for inputting, to a differentiator of the master controller 216, a differentiation time Td obtained by the predetermined fuzzy reasoning up to the end from the start of the port-in. COPYRIGHT: (C)2004,JPO&NCIPI
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