ELECTRIC CHARGE VOLUME EVALUATING DEVICE, ITS MANUFACTURING METHOD, AND METHOD OF EVALUATING ELECTRIC CHARGE VOLUME

摘要

PROBLEM TO BE SOLVED: To provide an electric charge volume evaluating method capable of quantitatively and easily evaluating the electric charge volume of a semiconductor device, and to provide an evaluating wafer used for the method. SOLUTION: An electric charge volume evaluating wafer is equipped with a silicon substrate 1 and a p-type region 6 that is sandwiched between a first silicon oxide film 2 and an SA-NSG film 7 and surrounded with an undoped silicon film 4, and the wafer is subjected to processing that requires an evaluation. Then, the wafer is subjected to etching using a BHF solution, then the etching volume of the p-type region 6 is measured, and the amount of positive electric charge generated by processing in the wafer can be easily quantitatively and easily evaluated. COPYRIGHT: (C)2004,JPO&NCIPI