| 摘要 |
An electro-forming master, its manufacturing method, and a metal minute pattern repeatedly formed by the electro-forming master are disclosed. The electro-forming master includes a concave portion formed on an upper surface of an electrode base, and an insulating hetero-material portion is formed by filling an insulating hetero-material in the concave portion, wherein the surface of the insulating hetero-material portion is flush with the surface of the concave portion. The concave portion is formed by an etching process, a mechanical process, or a laser process. The insulating hetero-material portion having foaming property is used. Preferably, the insulating hetero-material portion has elasticity. The insulating hetero-material portion having elasticity includes silicon as a main component. Silicon has elasticity in addition to excellent insulating and hereto characteristics. |
