| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a deflection method and a deflection apparatus for making the apparatus smaller in size even when the deflection angle of the deflection apparatus is small, and to provide a laser processing apparatus. <P>SOLUTION: Deflecting means 3a, 3b with variable deflection angles, a condenser lens 4, and a total reflection mirror 5 are disposed. Laser beams 2a, 2b, 2c emitted from the deflecting means 3a, 3b are condensed by the condenser lens 4 into beams having smaller diameters than the diameters of the laser beams 2 incident on the deflecting means 3a, 3b, and the condensed beams separated from each other for avoiding superposition of optical paths are made to enter the total reflection mirror 5. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
