| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for sequentially picking up individually independent dies. SOLUTION: A porous suction plate 2 is arranged on an X-Y-Z stage 1, vacuum suction is performed by a suction chamber 3, a suction blocker 5 is arranged in the suction chamber 3 so as to be freely move in the vertical directions, and leakage covers 6, 7 which is freely movable in the X direction are formed so as to cover the upper surface of the porous suction plate 2. A collet 8, which is freely movable in the vertical and horizontal directions, is arranged on the same axial line as the suction blocker 5 on the upper position of the suction plate 2; a die to be picked up is arranged on the same axial line as the suction blocker 5 and the collet 8, and while the blocker 5 is brought into contact with the lower surface of the suction plate 2, to block the suction force; the die is picked up by the collet 8; and the surface of the suction plate 2, from which the picked-up die is drawn out, is covered with the leak covers 6, 7. COPYRIGHT: (C)2004,JPO&NCIPI |
