| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyance table without deforming or breaking a metal ribbon [or a TAB (tape automated bonding) tape] when the metal ribbon (or the TAB tape) is conveyed and etched during its conveying, and to provide a conveying method capable of preventing an etching liquid from being accumulated. SOLUTION: As the constitution of the table for conveyance, a treatment table provided with a rail forming a groove in a direction orthogonal to the conveyance direction, and a net member having a part supporting tape only in the conveyance direction on the rail of the treatment table are provided. As the conveying method, a treatment table provided with a rail forming a groove in a direction orthogonal to the conveying direction is arranged, a net member having a part supporting tape only in the conveyance direction is arranged on the rail of the treatment table, and the tape is conveyed on the rail. COPYRIGHT: (C)2004,JPO&NCIPI
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