| 摘要 |
A thermally efficient resistive heater assembly for heating a source substance for generation of gas has a chamber for containing the source substance, a thin resistive heating element suspended across an aperture and disposed for immersion in the source substance, and conductive traces electrically coupled to the thin resistive heating element. The resistive heater assembly may be fabricated by a specially adapted method including providing a first substrate layer, bonding to it a second substrate layer, the second substrate layer bearing the resistive heating element and conductive traces, bonding to that an optional hydrophobic layer if necessary, and bonding to the previous layer a top layer. At least one of the layers may include manifolding for the gas. All or part of the fabrication method may be performed as a reel-to-reel process.
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