| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film magnetic head which allows the throat height of a recording head to be controlled precisely, allows not only a magnetic pole tip but an upper magnetic pole layer to be processed ultra-finely with submicron-width precision. SOLUTION: After a first magnetic pole 19a is formed on a first magnetic layer 18, a first insulating layer 20a is formed on the neighboring area of the first magnetic pole 19a on the first magnetic layer 18. On the first insulating layer 20a, a thin film coil 21 is formed so as to be the same height at least as the first magnetic pole 19a, and then a second insulating layer 20b is formed between windings of the thin film coil 21. After a recording gap layer 22 is formed on a flattened surface of the first magnetic pole 19a and the thin film coil 21, a second magnetic layer 25" including a second magnetic pole is formed on the recording gap layer 22. COPYRIGHT: (C)2004,JPO&NCIPI
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