| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor sensor having both a function of a pressure sensor and a function of an acceleration sensor, capable of miniaturization and weight reduction. SOLUTION: This semiconductor sensor 16 is equipped with a common pedestal 30, a first pedestal 40 joined airtightly to one face of the common pedestal 30, and a second pedestal 50 joined to the other face of the common pedestal 30. A first electrode 31 is provided on one face of the common pedestal 30, and a second electrode 32 is provided on the other face. A diaphragm 42 is formed on the first pedestal 40 by formation of a hollow part 41, and the diaphragm 42 is provided with a third electrode 45 facing to the first electrode 31, and an airtight space 48 is formed by the hollow part 41 by joining the common pedestal 30 to the first pedestal 40. The second pedestal 50 is provided with a weight mass 53 supported elastically by a spring support 52 and displaced by an acceleration, and the weight mass 53 is provided with a fourth electrode 54 facing to the second electrode 32. COPYRIGHT: (C)2004,JPO&NCIPI
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