| 摘要 |
PURPOSE: A wafer transfer apparatus is provided to decrease a possibility of wafer damage, to reduce a process time, and to save space and apparatus by manufacturing a wafer consecutively and by simplifying wafer transfer operations. CONSTITUTION: A wafer transfer apparatus(21) includes a robot arm(211) and a stage and is applied to a wafer ball arrangement member(2). The wafer ball arrangement member includes one or more wafer cassettes(20), a flux load unit(22), a ball arrangement unit(23), a reflow oven unit(25), and an unloader(26). The robot arm lifts a wafer from the one or more wafer cassettes and transfers the wafer to or from one selected from the wafer cassettes, the flux load unit, the ball arrangement unit, and the reflow oven unit. A stage(212) transfers the robot arm such that the robot arm is transferred upward. The ball arrangement unit includes an examination unit(24). The robot arm transfers the wafer to or from the examination unit.
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