发明名称 METHOD FOR MANUFACTURING HALL SUBSTRATE FOR VACUUM SUCTION AND PACKAGE METHOD FOR ORGANIC ELECTROLUMINESCENCE DEVICE USING HALL SUBSTRATE
摘要 PURPOSE: A method and a package method are provided to reduce the weight of a display by using a thin sealing cap and allow for a mass production of organic electroluminescence devices. CONSTITUTION: A method for manufacturing a hall substrate comprises a first step of sequentially depositing a titanium thin film(221) and a copper thin film(222) on a glass substrate(210); a second step of forming a photoresist pattern on the copper thin film in such a manner that the photoresist pattern has a shape and a size same as the shape and the size of a sealing cap; a third step of permitting a metal structure(240) to be grown on the copper thin film where the photoresist pattern is not formed; a fourth step of removing the photoresist pattern by using a solvent; a fifth step of removing, by using a solvent, the metal thin film exposed in the fourth step; and a sixth step of forming a plurality of halls(270) at constant intervals on the glass substrate exposed in the fifth step.
申请公布号 KR20040061697(A) 申请公布日期 2004.07.07
申请号 KR20020087984 申请日期 2002.12.31
申请人 MEMSWARE 发明人 CHO, SU JE
分类号 H05B33/04;(IPC1-7):H05B33/04 主分类号 H05B33/04
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