| 摘要 |
PURPOSE: A cleaning dry apparatus is provided to effectively eliminate the moisture on a substrate by injecting condensed hot wind into an air knife used in a dry process or heating the injected air inside the air knife by a predetermined heating unit and by spraying the heat wind or the heated air onto the substrate. CONSTITUTION: A transfer roller conveyer transfers a substrate from a loading part to un unloading part. A cleaning unit sprays a cleaning solution, located according to the proceeding direction of the substrate. An air knife drying unit sprays hot wind to remove the moisture on the substrate having passed through the cleaning unit.
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