| 摘要 |
Provided is a grating interference type optical encoder including a scale board, a diffraction grating located on the scale board, a light receiving element, an illumination optical system for emitting a coherent light fluxes to the diffraction grating on the scale board that relatively moves, to produce two diffraction light fluxes having different orders, an arc-shaped grating for re-emitting to the diffraction grating the two diffraction light fluxes having the different orders which are produced in the diffraction grating portion through a deflection unit, and a light guiding unit for superimposing rediffraction light fluxes produced by rediffracting the diffraction light fluxes re-emitted to the diffraction grating and guiding the superimposed rediffraction light fluxes to the light receiving element. The grating interference type optical encoder further includes: a phase grating that divides the rediffraction light fluxes superimposed between the diffraction grating and the light receiving element into a plurality of light fluxes, and a linear deflection element having different deflection directions corresponding to the plurality of light fluxes divided by the phase grating. <IMAGE> |
