METHOD FOR MANUFACTURING VARIABLE CAPACITOR

摘要

PURPOSE: A method for manufacturing a variable capacitor is provided to be capable of varying the capacitance of the capacitor. CONSTITUTION: A lower electrode(32) is formed on a substrate(30). A plurality of dielectric films(34) and upper electrodes(36) are formed on the lower electrode to define a plurality of unit capacitors. An interlayer dielectric(38) is formed on the resultant structure. Contact holes(40a,40b) are formed to expose the upper electrodes and the lower electrodes by selectively etching the interlayer dielectric. Metal lines(42a,42b) are formed to connect the single lower electrode and the plurality of upper electrodes through the contact holes.