| 摘要 |
PURPOSE: A method for fabricating an inductor is provided to increase the number of turns of a coil part in a small space and increase an inductance value by fabricating an inductor of the same Solenoid type in the same space. CONSTITUTION: A substrate(100) including the first insulation layer is prepared. The first metal pattern(102) as a lower part of the first inductor coil part is formed on the first insulation layer by a dual damascene process. The second insulation layer(104) is formed on the resultant structure including the first metal pattern. The first conductive plug(105) for forming a Solenoid-type coil part of the first inductor and the second metal pattern(108) as a lower part of the second inductor coil part are formed on the second insulation layer by a dual damascene process. The third insulation layer(110) is formed on the resultant structure including the second metal pattern. The second conductive plug(111) and the third metal pattern(112) for forming the upper part of the second inductor coil part are formed on the third insulation layer by a dual damascene process. The fourth insulation layer is formed on the resultant structure including the third metal pattern. The third conductive plug(115) and the fourth metal pattern(116) that forms the upper part of the first inductor and is connected to the third conductive plug are formed on the fourth insulation layer by a dual damascene process.
|
