Transporting mechanism, movable probe card transporting apparatus using transporting mechanism, and prober

摘要

A probe card transporting apparatus (10) includes a truck (11) and transporting mechanism (12). The truck (11) can move on a floor surface (G) freely. The transporting mechanism (12) is arranged above the truck (11) to be able to separate from and come into contact with it. The transporting mechanism (12) transports a probe card (C) between the truck (11) and a prober (100). The transporting mechanism (12) has a base (13) and arm mechanism (14). The arm mechanism (14) moves forward/backward on the base (13). An aligning mechanism (40) and fixing mechanism (50) are provided on the base (13). The aligning mechanism (40) serves for alignment with the prober (100). The fixing mechanism (50) serves for fixing to the prober (100). <IMAGE>