摘要 |
PURPOSE: A structure of a switching element of an LCD(liquid crystal display) and a method for fabricating the switching element are provided to easily fabricate a slit mask. CONSTITUTION: An electrode material is deposited on a substrate(601) and patterned using the first mask to form a gate electrode(602). A gate insulating layer(603), an active layer and an electrode layer(606) are sequentially formed on the substrate. A photoresist layer is formed on the electrode layer and patterned using the second mask that is a slit mask to form a photoresist pattern selectively left on a channel region. A portion of the photoresist layer, formed on the electrode layer disposed on the gate electrode, is selectively removed. An exposed portion of the electrode layer is etched and the active layer is etched by a predetermined thickness to form source and drain regions. The remaining photoresist pattern is removed. A passivation layer(609) is formed on the overall surface of the substrate.
|