APPARATUS FOR PROTECTING PEDESTAL OF VERTICAL FURNACE

摘要

PURPOSE: An apparatus for protecting a pedestal of a vertical furnace is provided to selectively exchange the first and second protecting members according to the influence from the process gas inside the vertical furnace by installing a cylindrical protection unit on the circumference of the pedestal such that the protection unit protects the pedestal from corrosion by process gas and contaminants and is composed of the first and second protection members used in the upper and lower parts of the pedestal. CONSTITUTION: The first protection member(121) of a cylindrical type surrounds the circumference of the upper part(111) of the pedestal, placed on the upper support plate(130) of a disc type formed on the pedestal. One end of the second protection member(122) is supported by the lower support plate(140) of a disc type formed under the pedestal, and the other end of the second protection member settles and supports the first protection member.