发明名称 |
LIQUID CRYSTAL DISPLAY AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
PURPOSE: An LCD(liquid crystal display) and a method for manufacturing the LCD are provided to simplify a manufacturing process and reduce manufacturing cost. CONSTITUTION: A to-be-etched layer(103) is formed on a substrate(101). A Ti film(110) is formed on the to-be-etched layer. A predetermined portion of the Ti film is exposed using a mask(107) to form a TiN film. The TiN film is selectively etched to form a Ti pattern. The to-be-etched layer is etched with the Ti pattern blocking the to-be-etched layer. The Ti pattern is etched to be removed. The Ti film is exposed using UV rays or laser beams such that Ti is nitrided to form the TiN film. The TiN film is etched through dry etch. The Ti layer is etched through wet etch or dry etch. |
申请公布号 |
KR20040062108(A) |
申请公布日期 |
2004.07.07 |
申请号 |
KR20020088430 |
申请日期 |
2002.12.31 |
申请人 |
LG.PHILIPS LCD CO., LTD. |
发明人 |
CHAE, GI SEONG;HWANG, YONG SEOP |
分类号 |
G02F1/136;G02F1/1343;G02F1/1362;G02F1/1368;H01L21/336;H01L21/77;H01L27/12;H01L29/45;H01L29/49;(IPC1-7):G02F1/136 |
主分类号 |
G02F1/136 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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