APPARATUS FOR MEASURING TEMPERATURE OF SEMICONDUCTOR DEVICE TEST HANDLER

摘要

PURPOSE: An apparatus for measuring the temperature of a semiconductor device test handler is provided to accurately detect the temperature of a semiconductor device by making a temperature sensor indirectly contact the surface of the semiconductor device coupled to a socket when a device like a BGA(ball grid array) semiconductor device is tested. CONSTITUTION: One end of a connector(104) made of a conductive material comes in contact with the surface of the semiconductor device(S) mounted on a carrier(40) for detachably fixing the semiconductor device, and the other end of the connector is installed in the carrier to be expose to the opposite of the carrier. A temperature sensor(102) is installed in a push unit to detect the temperature of the semiconductor device so that an end of the temperature sensor comes in contact with the connector of the carrier when the push unit pushes the carrier. A control unit controls the injection of cooling fluid through a nozzle assembly according to temperature information transferred from the temperature sensor, electrically connected to the temperature sensor.