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发明名称
METHOD AND APPARATUS FOR TREATING EXHAUST GASES CONTAINING FLUORINE-CONTAINING COMPOUNDS
摘要
申请公布号
EP1434644(A1)
申请公布日期
2004.07.07
申请号
EP20020801516
申请日期
2002.10.09
申请人
EBARA CORPORATION
发明人
MORI, YOICHI
分类号
B01D53/86;B01J21/04;B01J23/30;C07B37/06;(IPC1-7):B01D53/86
主分类号
B01D53/86
代理机构
代理人
主权项
地址
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