发明名称 |
Methods for determination of additive concentration in metal plating baths |
摘要 |
The present invention relates to PCGA analytical procedure, in which each PCGA plating/measuring cycle is performed with the stripping and cleaning of test electrode immediately conducted before the equilibrium step, so as to use the metal plate layer formed during a previous plating/measuring cycle as a protective layer for the test electrode. The present invention also relates to PCGA calibration measurement protocol, in which both the calibration measurements and the sample measurement are conducted after a background measurement step.
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申请公布号 |
US6758955(B2) |
申请公布日期 |
2004.07.06 |
申请号 |
US20020313801 |
申请日期 |
2002.12.06 |
申请人 |
ADVANCED TECHNOLOGY MATERIALS, INC. |
发明人 |
ROBERTSON PETER M. |
分类号 |
C25D21/12;G01N33/20;(IPC1-7):G01N27/26 |
主分类号 |
C25D21/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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