| 摘要 |
PURPOSE: An apparatus and method for monitoring the cleaning degree of a surface in real time using laser beam are provided to be capable of simplifying a monitoring process without using surface analysis equipment by simultaneously measuring the reflected and transmitted light of the laser beam and comparing with each other. CONSTITUTION: An apparatus for monitoring the cleaning degree of a surface in real time using laser beam is provided with a light source part(110) for generating laser beam, a light path control part(112) for irradiating the laser beam to a sample(106), and a first detection part(130a) for detecting the transmitted light of the laser beam through the sample. The apparatus further includes a second detection part(130b) for detecting the reflective light of the laser beam from the sample, and a comparison and display part(140) for comparing the signals supplied from the first/second detection parts with each other and displaying the cleaning state of the sample.
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