METHOD OF REGULATING A HIGH TEMPERATURE GASEOUS PHASE PROCESS AND USE OF SAID METHOD

摘要

The invention relates to a method of regulating a high temperature gaseous phase process such as CVD or CVI on the basis of a measuring curve obtained by infrared spectroscopy. Said measuring curve indicates at least one spectral range that is characteristic of the regulation of the process and that diffe rs from the background of the measuring curve. The aim of the invention is to allow a regulation of high temperature gaseous phase processes optimally and quickly even if the temperatures change during the process. To this end, a straight line is calculated directly from the measuring curve on the basis o f the initial and the end values of the characteristic spectral range. The process is then regulated by integration of the spectral range above the straight line or by determination of the maximum height of the spectral rang e above the straight line or by referring to another characteristic value of t he spectral range with respect to the straight line.