| 摘要 |
PURPOSE: An apparatus for discharging etchant is provided to discharge etching solution of vapour state into an inside cylinder of a discharge member, thereby capable of preventing erosion and pollution of the apparatus. CONSTITUTION: The structure of the discharge member(300) is a cylindrical shape so that the etching solution of vapour state is flowed into an etching liquid supply device and then discharged to the outside. Holes are formed at the inside of the discharge member(300) so that gases are penetrated. A discharge plate(303) is arranged at a lower portion of the cylindrical discharge member(300) so that the etching solution liquefied due to a drop in temperature is collected when discharging the etching solution of vapour state through the discharge member(300). Etching solution remaining at the center of the discharge plate(303) is discharged to the outside through a discharge tube(305).
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