发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>PURPOSE: A semiconductor device and a method for manufacturing the same are provided to be capable of preventing peeling or lifting of a metal pad due to pull-up test in wire bonding. CONSTITUTION: A metal interconnection(51) is formed on a substrate(50). An insulating layer(52) is formed on the metal interconnection. A plurality of via contacts(53a-53e) are connected to the metal interconnection through the insulating layer. A metal pad(54) is formed on the via contacts. Each width of the via contacts becomes narrower from the edge portion to the center portion.</p>
申请公布号 KR20040059940(A) 申请公布日期 2004.07.06
申请号 KR20020086446 申请日期 2002.12.30
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE, SEONG GWON
分类号 H01L21/60 主分类号 H01L21/60
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