| 摘要 |
PURPOSE: A process for manufacturing nano tungsten powder by low pressure vapor reaction is provided to obtain nano tungsten powder having high strength and superior abrasion resistance by manufacturing tens of nanometer grade tungsten powder using tungsten contained precursor by the low pressure vapor reaction. CONSTITUTION: In a process for manufacturing tungsten powder from a tungsten contained precursor, the process comprises a step of preparing the tungsten contained precursor; a step of generating gas by vaporizing or sublimating the precursor; a step of separating tungsten constituent from the gas by maintaining the gas to a pressure less than an atmospheric pressure at an inert atmosphere; and a step of condensing the tungsten constituent at a pressure less than an atmospheric pressure, wherein the precursor is at least one or more selected from tungsten ethoxide, tungsten chloride and tungsten hexacarbonyl, wherein the inert atmosphere is formed by using at least one or more gases selected from CO, CO2, H2, He, Ar, N2 and a mixture thereof, wherein the tungsten constituent separation step is performed at a temperature of 500 to 1,500 deg.C, and wherein the separated tungsten constituent is adsorbed onto the surface of cooler having a sub-zero temperature so that tungsten is condensed.
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