| 发明名称 |
Microwave stripline applicators |
| 摘要 |
An apparatus and method which maintains plasma discharges (for instance 25) in containers (for instance 20) which have an internal section of 1 cm or less in width are described. The very small cross-section plasma discharges are useful in MEMS devices, in spectrometers and in spectroscopy.
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| 申请公布号 |
US6759808(B2) |
申请公布日期 |
2004.07.06 |
| 申请号 |
US20020280142 |
申请日期 |
2002.10.25 |
| 申请人 |
BOARD OF TRUSTEES OF MICHIGAN STATE UNIVERSITY |
发明人 |
GROTJOHN TIMOTHY A.;ASMUSSEN JES;WIJAYA ANDY |
| 分类号 |
H05H1/24;(IPC1-7):H01J7/24 |
主分类号 |
H05H1/24 |
| 代理机构 |
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