发明名称 Method for manufacturing flash memory device
摘要 The present invention relates to a method of manufacturing a flash memory device. In the method, a low-voltage transistor is formed to have a DDD structure same to a high-voltage transistor when a peripheral region is formed in the manufacture process of the flash memory device. As the process for forming the LDD structure for the low voltage is omitted, the cost is reduced in the entire process of manufacturing the flash memory device. Also, as the junction breakdown voltage of the low-voltage transistor is increased and current is increased, the device characteristics is improved
申请公布号 US6759299(B2) 申请公布日期 2004.07.06
申请号 US20020321720 申请日期 2002.12.18
申请人 HYNIX SEMICONDUCTOR INC. 发明人 LEE YOUNG BOK;JUNG SUNG MUN;AHN JUNG RYUL
分类号 H01L27/115;H01L21/8247;H01L27/105;(IPC1-7):H01L21/824 主分类号 H01L27/115
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